30 

Novel SU-8/Ionic Liquid Composite for Tribological Coating and MEMS

Leili Batooli, Sandra Guadalupe Maldonado, Moshe Judelewicz and Stefano Mischler Micromachines 2015, 6,611-621

Tribology of SU-8 polymer is increasingly relevant due to bursting use of this material in a variety applications. This study is directed towards introduction and investigation of a novel self-lubricating composite of an ionic liquid (IL)vin SU-8. The new material can be utilized for facrication of lubricating polymer coating with tunable surface properities or SU8-made elements for microelectromechanical systems (MEMS) with enhanced tribological performance; [...]

29 

SU-8 as a Material for Microfabricated Particle Physics Detectors

Pietro Maoddi , Alessandro Mapelli, Sebastien Jiguet and Philippe Renaud Micromachines 2014, 5(3), 594-606

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors.:[...]

28 

On-chip light sheet illumination enables diagnostic size and concentration measurements of membrane vesicles in biofluids

Hendrik Deschout , Raemdonck Koen, Stremersch S, Maoddi P, Mernier G, Renaud P, Jiguet S, Hendrix A, Bracke M, Van den Broecke R, Röding M, Rudemo M, Demeester J, De Smedt SC, Strubbe F, Neyts K, Braeckmans K. Nanoscale, 2014, 6, 1741-1747, Date: 2014

Cell-derived membrane vesicles that are released in biofluids, like blood or saliva, are emerging as potential non-invasive biomarkers for diseases, such as cancer. Techniques capable of measuring the size and concentration of membrane vesicles directly in biofluids are urgently needed. Fluorescence single particle tracking microscopy has the potential of doing exactly that by labelling the membrane vesicles with a fluorescent label and analysing their Brownian motion in the biofluid.:[...]

27 

Biomimetic Pieris rapae’s Nanostructure and Its Use as a Simple Sucrose Sensor

David Bonzon, Rodrigo Martinez-Duarte, Philippe Renaud and Marc Madou MICROMACHINES 2014, 5, 216-277 Date: 2014

Biomimetics often provides efficient ways to create a product incorporating novel properties. Here we present the replication of the Pieris rapae butterfly optical structure. This butterfly has white wings with black spots. The white coloration is produced by light scattering on pterin beads ranging from 100 to 500 nm whereas black spots correspond to areas without pterin beads, thus revealing a highly pigmented layer underneath. In order to mimic the butterfly wing structure, we deposited SU-8 beads produced by electrospraying on a black absorbing layer made of black SU-8:[...]

26 

Electrical conductivity of multi-walled carbon nanotubes-SU8 epoxy composites

Claudio Grimaldi, Marijana Mionic, Richard Gaal, Laszlo Forro, and Arnaud Magrez APPLIED PHYSICS LETTERS 102, 223114 (2013) Date: 2013

We have characterized the electrical conductivity of the composite which consists of multi-walled
carbon nanotubes dispersed in SU8 epoxy resin. Depending on the processing conditions of the epoxy
(ranging from non-polymerized to cross-linked), we obtained tunneling and percolating-like regimes
of the electrical conductivity of the composites. :[...]

25

Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

Loic Jacot-Descombes, Cristina Martin-Olmos, Maurizio Rosario Gullo,a Victor Javier Cadarso,a Gregory Mermoud,b Luis Guillermo Villanueva, Massimo Mastrangeli, Alcherio Martinolib and J¨urgen Brugger, Soft Matter, 2013, 9, 9931–9938 Date: 2013

Fluid-mediated self-assembly is one of the most promising routes for assembling and packaging smart microsystems in a scalable and cost-efficient way. In this work the pairwise fluidic self-assembly of
100 mm-sized SU-8 cylinders is studied with respect to two driving mechanisms:[...]

24 

Carbon nanotubes–SU8 composite for flexible conductive inkjet printable applications

Marijana Mionić , Kristopher Pataky , Richard Gaal , Arnaud Magrez , Jürgen Brugger and László Forró . J. Mater. Chem., 2012,22, 14030-14034 Date: 2012

We have developed a conducting composite based on multi-walled carbon nanotubes and bisphenol A novolak epoxy resin (SU8) for inkjet printing purposes. We could deposit regular conducting stripes and arrays of 150 μm spots on glass and on flexible polyethylene terephthalate (PET) films[...]

 

23 

3-dimensional free standing micro-structures by proton beam writing of SU8 silver nanoParticle polymeric composite

H. Igbenehu and S. Jiguet, Materials Science and Engineering 40 (2012)012002, Date: 2012,

Proton beam lithography a maskless direct-write lithographic technique (well suited for producing 3-Dimensional microstructures in a range of resist and semiconductor materials) is demonstrated as an effective tool in the creation of electrically conductive freestanding micro-structures in an Su 8 + Nano Silver polymer composite.[...]

 

22 

Polyimide foam-like microstructures: technology and mechanical properties

J A Dobrzynska1,3,4, P Joris1,4, S Jiguet2, P Renaud1 and MAM Gijs, J. Micromech. Microeng. 21 (2011)
Date: 2011

We report a process for the realization of polyimide films with custom-designed microporosity
based on the heat-induced depolymerization of polyimide-embedded polypropylene carbonate
microstructures.[...]

 

21 

Suspended SU-8 structures for monolithic microfluidic channels

Y. Moser • R. Forti • S. Jiguet • T. Lehnert • M. A. M. Gijs, Microfluid Nanofluid (2011) 10:219–224
Date: 2011

SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip.[...]

 

20 

Development and Studies of Novel Microfabricated Radiation Hard Scintillation Detectors With High Spatial Resolution

A. Mapelli, B. Gorini, M. Haguenauer, S. Jiguet, N. Vico Triviño, and P. Renaud: IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 58, NO. 3, JUNE 2011
Date: 2011

Abstract—A new type of scintillation detector is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by coupling microfluidic channels filled with a liquid scintillator to photodetectors[...]

 

19 

Study of the mechanical response of carbon nanotubes-SU8 composites by nanoindentation

Marijana Mionic´1, Se´ bastien Jiguet, Moshe Judelewicz, Ayat Karimi1, La´ szlo´ Forro´ 1,
and Arnaud Magrez In:
Phys. Status Solidi B, 1–4 (2010)
Date: 2010

A new ultiwalled carbon nanotubes (MWCNTs)/SU8 composites have been produced to enhance the mechanical properties of SU8 photoresist.[...]

 

 

18

Scintillation particle detection based on microfluidics

Mapelli, A.a b , Gorini, B.b , Haguenauer, M.c , Jiguet, S.d , Miotto, G.L.b , Vandelli, W.b , Triviño, N.V.a , Renaud, P.a In: Sensors and Actuators, A: Physical 0924
Date: 2010

A novel type of particle detector based on scintillation, with precise spatial resolution and high radiation hardness, is being studied.[...]

 

17 

Preparation and characterizatiom of SU8-carbon nanotube composites

Marijana Mionic ; Sebastien Jiguet; Moshe Judelewicz; Laszlo Forro and Arnaud Magrez  In: Phys. Status Solidi B 246,
Date: 2009

A novel SU8–carbon nanotube composites have been produced toenhance the mechanical, electrical, and thermal properties of SU8 photoresists.[...]

 

16 

Novel radiation hard microfabricated scintillation detectors with high spatial resolution

Mapelli, A. ; Gorini, B. ; Haguenauer, M. ; Jiguet, Sébastien et al.  In: Nuclear Instruments and Methods in Physics Research section A, 2009
Date: 2009

A novel liquid scintillation detector with high spatial resolution is being developed with standard microfabrication techniques. [...]

Notice détaillée - Chercher des notices similaires

15

 SU-8 microfluidic device for scintillating particle detection

Mapelli, A. ; Gorini, B. ; Haguenauer, M. ; Jiguet, Sébastien et al.  Présenté à: Eurosensors XXIII conference, Lausanne, Switzerland, September 6-9, 2009.
In: Procedia Chemistry, vol. 1, num. 1, 2009, p. 1347-1350
Elsevier, 2009.

This paper presents the study of a novel scintillation detector based on standard microfabrication techniques. [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

14

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Fakhfouri, V ; Jiguet, S ; Brugger, J In: Advances in Science and Technology, vol. 45, 2006, p. 1293-1298
Présenté à: CIMTEC 2006 (11th International Conferences on Modern Materials and Technologies), Sicily, Italy , 4-9 June, 2006.
Date: 2006

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

13.

SU-8 nanocomposite coatings with improved tribological performance for MEMS

Jiguet, S. ; Judelevicz, M. ; Mischler, S. ; Hofmann, H. et al.  In: Surface & coatings technology, vol. 201, num. 6, 2006, p. 2289-2295
Date: 2006

The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures. [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

12

Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts

Jiguet, S ; Judelewicz, M ; Mischler, S ; Bertsch, A. et al.  In: Microelectronic Engineering, vol. 83, 2006, p. 1273-1276
Date: 2006

The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

11.

SU-8 nanocomposite photoresist with low stress properties for microfabrication applications

Jiguet, S. ; Bertsch, A. ; Judelewicz, M. ; Hofmann, H. et al.  In: Microelectronic engineering, vol. 83, 2006, p. 1966-1979
Date: 2006

Notice détaillée - Chercher des notices similaires - fulltext fulltext

10.

Conductive SU8 Photoresist for Microfabrication

Jiguet, Sébastien ; Bertsch, Arnaud ; Hofmann, Heinrich ; Renaud, Philippe In: Advanced Functional Materials, num. 15, 2005, p. 1511-1516
Date: 2005

A conductive composite photoresist has been developed for the direct photopatterning of electrodes [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

9.

SU8-silver photosensitive nanocomposite

Jiguet, S ; Bertsch, A ; Hofmann, H ; Renaud, P In: ADVANCED ENGINEERING MATERIALS, vol. 6, num. 9, 2004, p. 719-724
Date: 2004
ISSN: 1438-1656

Notice détaillée - Chercher des notices similaires - fulltext fulltext

8.

Microfabrication of ceramic components by microstereolithography

Bertsch, A ; Jiguet, S ; Renaud, P In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 14, num. 2, 2004, p. 197-203
Date: 2004
ISSN: 0960-1317

Microstereolithography is a technique that allows the manufacture of small and complex three-dimensional (3D) components in plastic material. [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

7

Ceramic microcomponents by microstereolithography

Bertsch, A ; Jiguet, S ; Hofmann, H ; Renaud, P In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, p. 725-728
Présenté à: 17th IEEE International Conference on Micro Electro Mechanical Systems, Maastricht, NETHERLANDS, JAN 25-29, 2004.
Date: 2004
ISBN: 0-7803-8265-X

This paper describes new polymer/ceramic photosensitive resins that can be used in the microstereolithography process for manufacturing complex 3D components in composite material. [...]

Notice détaillée - Chercher des notices similaires

6.

Conductive SU8-silver composite photopolymer

Jiguet, S ; Bertsch, A ; Hofmann, H ; Renaud, P In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, p. 125-128
Présenté à: 17th IEEE International Conference on Micro Electro Mechanical Systems, Maastricht, NETHERLANDS, JAN 25-29, 2004.
Date: 2004
ISBN: 0-7803-8265-X

A new electrically conductive photosensitive composite resist has been formulated and used to build microcomponents. [...]

Notice détaillée - Chercher des notices similaires

5.

Polyimide and SU-8 microfluidic devices manufactured by heat-depolymerizable sacrificial material technique

Metz, S ; Jiguet, S ; Bertsch, A ; Renaud, P In: LAB ON A CHIP, vol. 4, num. 2, 2004, p. 114-120
Date: 2004
ISSN: 1473-0189

The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

4.

Microstereolithography: a review

Bertsch, A ; Jiguet, S ; Bernhard, P ; Renaud, P et al.  In: RAPID PROTOTYPING TECHNOLOGIES, vol. 758, 2003, p. 3-15
Présenté à: Symposim on Rapid Prototyping Technologies, BOSTON, MASSACHUSETTS, DEC 03-05, 2002.
Date: 2003
ISBN: 1-55899-695-8

Microstereolithography is a technology at the interface of the microengineering and rapid prototyping domains. [...]

Notice détaillée - Chercher des notices similaires

3.

Composite photopolymer microstructures: From planar to 3D devices

Renaud, P ; Metz, S ; Jiguet, S ; Bertsch, A In: BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, p. 991-994
Présenté à: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, BOSTON, MASSACHUSETTS, JUN 09-12, 2003.
Date: 2003
ISBN: 0-7803-7731-1

Notice détaillée - Chercher des notices similaires

2.

Microfabrication d'objets composites fonctionnels en 3D et à haut facteur de forme, par procédés UV-LIGA et microstéréolithographie

Jiguet, Sébastien ; Renaud, Philippe Lausanne : EPFL, 2004.

The present thesis deals with new composite photoresists for the UV-LIGA and microstereolithography microfabrication processes. [...]

Notice détaillée - Chercher des notices similaires - fulltext fulltext

1.

High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates

Leroy, Christine ; Pisani, Marcelo B. ; Hibert, Cyrille ; Bouvet, Didier et al.  In: Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006, 2006
Présenté à: DTIP 2006, Stresa, Italy, April 2006.
Date: 2006

Notice détaillée - Chercher des notices similaires