Transmission electron microscopy (TEM) image of a silica/SU-8 nanocomposite microcut (50nm). The silica nanoparticles are well dispersed into the epoxy matrix. Jiguet, S. ; Bertsch, A. ; Judelewicz, M. ; Hofmann, H. et al. Microelectronic engineering, vol. 83, 2006, p. 1966-1979 Full textContinue Reading

The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper Evolution with time of the coefficient of friction under a normal load of 2 N for Inox balls, B and M different concentration of silica filler in SU8. Jiguet, S ; Judelewicz, M ; Mischler,...Continue Reading

The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures Optical images of wear traces left by steel balls on (a) SU8, (b) SU8 after heat treatment, (c) A composite, (d) composite A after heat treatment, (e) B composite,...Continue Reading