Polyimide foam-like microstructures: technology and mechanical properties

We report a process for the realization of polyimide films with custom-designed microporosity based on the heat-induced depolymerization of polyimide-embedded polypropylene carbonate microstructures.

SEM cross-section views of fabricated arrays of microcavities in a PI layer: (a) 30 μm wide voids; (b) 80 μm wide voids; (c) PI layer stack encompassing two levels of cavities; (d) a zoom into the rectangular area of the image above; (e) a 150 μm wide channel with an aspect ratio of 15:1. All scale bars corresponding to 100 μm.

J A Dobrzynska1,3,4, P Joris1,4, S Jiguet2, P Renaud1 and MAM Gijs, J. Micromech.

Microeng. 21 (2011)