Abstract—A new type of scintillation detector is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by coupling microfluidic channels filled with a liquid scintillator to photodetectors Top view of the microfluidic scintillation detector. A. Mapelli, B. Gorini, M. Haguenauer, S. Jiguet, N. Vico Triviño, and P. Renaud:...Continue Reading
SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip Fabrication process of a suspended SU-8 structure for a monolithic closed SU-8 microchannel. a A standard SU-8 layer...Continue Reading
We report a process for the realization of polyimide films with custom-designed microporosity based on the heat-induced depolymerization of polyimide-embedded polypropylene carbonate microstructures. SEM cross-section views of fabricated arrays of microcavities in a PI layer: (a) 30 μm wide voids; (b) 80 μm wide voids; (c) PI layer stack encompassing two levels of cavities; (d) a zoom...Continue Reading
A novel type of particle detector based on scintillation, with precise spatial resolution and high radiation hardness, is being studied Mapelli, A.a b , Gorini, B.b , Haguenauer, M.c , Jiguet, S.d , Miotto, G.L.b , Vandelli, W.b , Triviño, N.V.a , Renaud, P.a Sensors and Actuators, A: Physical0924Continue Reading
A new ultiwalled carbon nanotubes (MWCNTs)/SU8 composites have been produced to enhance the mechanical properties of SU8 photoresist TEM (left) and HRSEM (right) micrographs of a repre- sentative composite showing a good dispersion of MWCNTs. Marijana Mionic, Sebastien Jiguet, Moshe Judelewicz, Ayat Karimi, Laszlo Forro, and Arnaud Magrez Phys. Status Solidi B, 1–4 (2010)Continue Reading
This paper presents the study of a novel scintillation detector based on standard microfabrication techniques. Fabrication of SU-8 microchannels Mapelli, A. ; Gorini, B. ; Haguenauer, M. ; Jiguet, Sébastien et al. Présenté à: Eurosensors XXIII conference, Lausanne, Switzerland, September 6-9, 2009 Procedia Chemistry, vol. 1, num. 1, 2009, p. 1347-1350 Full textContinue Reading
A novel liquid scintillation detector with high spatial resolution is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by filling microfluidic channels with an organic liquid scintillator and optically coupled to a pixellated photodetector. Such a microfluidic device can be designed and processed to meet the requirements...Continue Reading
Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. SU8–carbon nanotube composites have been produced to enhance the mechanical, electrical, and thermal properties of SU8 photoresists. Homogeneous composites materials have been obtained...Continue Reading
We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer a) Schematic illustration of the ceramic-MEMS cantilever fabrication sequence based on SU-8 micromolds, b) Full wafer (100-mm) micro/macro-molds with the...Continue Reading
Transmission electron microscopy (TEM) image of a silica/SU-8 nanocomposite microcut (50nm). The silica nanoparticles are well dispersed into the epoxy matrix. Jiguet, S. ; Bertsch, A. ; Judelewicz, M. ; Hofmann, H. et al. Microelectronic engineering, vol. 83, 2006, p. 1966-1979 Full textContinue Reading
