Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Gersteltec Engineering Solutions
Swiss Made SU-8 photoepoxy functional products for MEMS, LIGA and Microelectronics

SU-8 nanocomposite photoresist with low stress properties for microfabrication applications

Transmission electron microscopy (TEM) image of a silica/SU-8 nanocomposite microcut (50nm). The silica nanoparticles are well dispersed into the epoxy matrix.

Jiguet, S. ; Bertsch, A. ; Judelewicz, M. ; Hofmann, H. et al.

Microelectronic engineering, vol. 83, 2006, p. 1966-1979

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