SU-8 nanocomposite coatings with improved tribological performance for MEMS

The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures

Optical images of wear traces left by steel balls on (a) SU8, (b) SU8 after heat treatment, (c) A composite, (d) composite A after heat treatment, (e) B composite, (f) B composite after heat treatment. The horizontal frame of each picture corresponds to 0.6 mm.

Jiguet, S. ; Judelevicz, M. ; Mischler, S. ; Hofmann, H. et al.

Surface & coatings technology, vol. 201, num. 6, 2006, p. 2289-2295

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