Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Gersteltec Engineering Solutions
Swiss Made SU-8用于MEMS和微电子的光氧功能产品

Day

30 6 月, 2006
30
6 月
30 6 月 2006

使用SU-8微模的聚氨酯陶瓷-MEMS的表面微加工

我们描述了一种用于制造陶瓷型MEMS器件的新型表面微加工工艺,例如独立式吊臂,该工艺基于SU8和铝的高纵横比微...
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